wafer）的一系列处理
1、清洗
->
2、在晶片上铺一层所需要的半导体
->
3、加上掩膜
->
4、把不要的部分腐蚀掉
->
5、清洗
重复2到5就可以得到所需要的芯片了
Cleaning
->
Deposition
->
Mask
Deposition
->
Etching
->
Cleaning
1、中的清洗过程中会用到硝酸，氢氟酸等酸，用于清洗有机物和无机物的污染
其中Deposition过程可能会用到多种器材，比如HELIOS等~
Mask
Deposition过程中需要很多器材，包括Spinner，Hot
plate，EVG等等~
根据材料不同或者需要的工艺精度不同，Etching也分很多器材，可以使用专门的液体做Wet
etch，或者用离子做Plasma
Etching等
最后一部的Cleaning一般是用Develpoer洗掉之前覆盖的掩模~
多数器材都是Oxford
Instruments出的
具体建议你去多看看相关的英文书，这里说不清楚。。
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