晶圆是怎么测量的?

晶圆是怎么测量的?,第1张

对集成电路来说:一般来说4寸晶圆的厚度为0.520mm,6寸晶圆的厚度为

0.670mm左右。晶圆必须要减薄,否则对划片刀的损耗很大,而且要划两刀。我们做DIP封装,4寸晶圆要减薄到0.300mm;6寸晶圆要减薄到0.320mm左右,误差0.020mm。

量测仪器片厚用千分尺就行了,膜厚一般用热波仪器量测,通过量测不同分布的多点厚度,求平均得出膜厚,一般同时反映膜的均匀性,并可见模拟等高线

Power semiconductor devices and power electronics

World's first semiconductor rectifier and the transistor is, when no power semiconductor or microelectronics semiconductor division. In 1958, China began the first research topic Thyristor (originally known as PNPN device). In similar time, the study of integrated circuits began gradually. From semiconductor devices to the two direction. The former became the basis for power electronics, while the latter led to the development and micro-electronics and information electronics.

According to the system, power system devices are classified to the machinery, integrated circuits, electronic systems are included. As the semiconductor leader in the electronic systems, coupled with the semiconductor integrated circuits is the main body, which after a long-term evolution of integrated circuits in a number of occasions, has become almost synonymous with semiconductor devices only.

At the end of the sixties and early seventies, the country has set off a "SCR" hot. The boom continued a long time, great influence, and therefore still believe that the domestic power of semiconductors is the main SCR. The late seventies, the development of a thyristor family. And called the name of a standardized "thyristor." As the technology to regulate the power switch, so the wear and tear on a small device, so as the energy trump card. Its application is to cover all fields. China was first mooted in 1979, the establishment of Power Electronics Society, IEEE slightly earlier than the establishment of the United States Institute of Power Electronics (Power Electronics Society). Power Electronics Society of China was founded, as a result of the importance of professional development is very rapid. However, because the focal point was the relationship, it does not like the United States become an independent professional institutes, and was subsequently set up part of the China Electrotechnical Society.

The translation and definition of Power Electronics for Power Electronics (the original idea was also known as the Power Electronics), and the popularity of power electronics played a role. Mechanical, electrical, electronic and other departments are very concerned about its development. Related to the power semiconductor devices has also been known as the power electronic devices. However, this name is very difficult to find abroad, but the corresponding terms. "Electricity" in reference to electronic access to universal, but also left a number of sequels. People mistakenly believe that only high-power direction is the "power" of the main electronic devices, and the difficulty of the rapid development of the MOSFET as a "power electronics" of the other main. From that point, I would like to use power semiconductor devices as the subject of this article, and power electronic devices can be used to express a broader sense to include other non-semiconductor, including a variety of power electronic devices.

The development of power semiconductor devices in three stages

The development of power semiconductor devices can be divided into three stages. The first stage is 60 to the seventies, when the various types of thyristors and power transistors Darlington significant development, or what might be called the era of bipolar. Its clients are mainly for industrial applications, including power systems, such as locomotive traction. The second stage is 80 to the nineties, due to the rise of the power MOSFET to power electronics into a new area. Modern 4C booming industry: the Communication, Computer, Consumer, Car (communication, computer, consumer electronics, automobiles) to provide a new vitality. Before and after the twenty-first century, the development of power semiconductor devices have entered the third phase, that is, and integrated circuit combined with a growing stage, Figure 1 and Figure II made to the above description of a simple sum. Of course, first of all need to focus on that here is this: when the continuous development of power semiconductor devices, the previous stage has not been the dominant product from the stage of history. For example, SCR is still an important product. China has in recent years the introduction of ultra-high-power thyristor, thyristor-controlled technology, such as China's major power transmission project, providing a key device. Recently, in considering the introduction of IGCT technology. In this regard it should be said that has gradually moved towards the world. This is our country going on the many major infrastructure. Although the view from the United States, the production of high-power thyristors have been less and less on the economic development of the two countries are not identical. I draw in Figure 2 in power semiconductor devices in both directions in the development. The left side of the bipolar nature of the direction toward the integration of ultra-high-power and direction. The right direction is unipolar, it is more established and integrated circuits of the inseparable relationship between closely.

Product quality is good or bad, determine whether the enterprise market, determines the level of economic efficiency of enterprises, determine the ability of the business in the fierce market competition for survival and development. Rapid growth after the financial crisis IC product demand, resulting in the semiconductor industry, an unprecedented seller's market, the major semiconductor manufacturers have expanded production capacity.

In the IC manufacturing industry, quality has always been the key to success when deciding factor. Every process, every step of the process, have a very complex, professional quality requirements. At this moment, on the IC manufacturers, to ensure the unity of production and quality, how to address the continued increase capacity at the same time, deliver high quality products, providing quality service, at this stage the semiconductor industry must pay attention to the problem.

Chip manufacturers have to keep improving the standard of quality management, continuous improvement quality management tools, to conduct a comprehensive quality management, continuous development in the can. China's semiconductor industry is a mature stage, it must strive to improve their quality management capabilities to produce high-quality low-cost products, is the only way to truly realize the glory of China's semiconductor industry as the world's dominant semiconductor industry.

给分哦.....


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