N是N型轻掺杂,电阻率1ohm.cm以上均可成为轻掺N型
P-Sub是指P型衬底,用来进行外延(Epi)的硅片。
Epi_wafer: 在single crystal wafer上再dep一层single crystal Si ,Improve the performance of bipolar transistor, with high breakdown voltage of the collector-substrate junction and low collector resistance. Lightly doped epiwafer minimizes latch-up effect, accurately controlled doing concentration.是在原本Heavily doped substrate上,以的方式成长一层Lightly doped Epi-layer,以作为CMOS制程的底材。因此CMOS是直接建立在Lightly doped Epi-layer上,而Heavily doped substrate则作为接地。此可使CMOS中直立式pnp双载子寄生电晶体的电流不易横向地流往寄生的npn电晶体,而流向Heavily doped substrate。因为底材接地,寄生pnp与npn的闭锁(Latch up)现象可被抑制,但相对使用Epi-Wafer会提高成本。欢迎分享,转载请注明来源:内存溢出
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